SAIP2016

Growing zirconium carbide (ZrC) layers by CVD using ZrCl4 mixed with CH4,Ar and H2

6 Jul 2016, 16:10

1h 50m

Kramer Law building

Board: F.024

Poster Presentation Track F - Applied Physics Poster Session (2)

Speaker

Mr Bilal Alawad (Department of physics, university of Pretoria,0002 - department of physics, sudan university of science and technology, Khartoum Sudan)

Main supervisor (name and email)<br>and his / her institution

Johan Malherbe,johan.malherbe@up.ac.za,(Department of physics ,university of Pretoria ,0002 South Africa )

Abstract content <br> &nbsp; (Max 300 words)<br><a href="http://events.saip.org.za/getFile.py/access?resId=0&materialId=0&confId=34" target="_blank">Formatting &<br>Special chars</a>

Zirconium carbide (ZrC) layers were grown on graphite substrate by chemical vapor deposition (CVD) using zirconium tetrachloride (ZrCl4) and methane (CH4), hydrogen (H2) and argon (Ar) as precursors. The layers were deposited at 1400 °C in atmosphere pressure. P=-5 Kpa The growth rate of ZrC layers as a function of temperature was investigated. The morphology of ZrC layers on graphite substrates were observed by scanning electron microscopy (SEM) and (EDS). The thickness of the layers was directly measured by SEM. The phases of the layers were characterized by X-ray diffraction (XRD). The results indicated that the deposition of ZrC was dominated by gas nucleation.

Keyword: Chemical vapor deposition (CVD), surface morphology, zirconium carbide (ZrC).

Level for award<br>&nbsp;(Hons, MSc, <br> &nbsp; PhD, N/A)?

PhD

Apply to be<br> considered for a student <br> &nbsp; award (Yes / No)?

Yes

Would you like to <br> submit a short paper <br> for the Conference <br> Proceedings (Yes / No)?

Yes

Please indicate whether<br>this abstract may be<br>published online<br>(Yes / No)

No