Speaker
Dr
Xin Liang Yan
(Shantou university, China)
Description
It is shown that the original in-depth distribution of composition can be directly obtained by the deconvolution of measured depth profiling data using the MRI (Mixing-Roughness-Information) depth resolution function, as demonstrated for the case that the original depth-concentration distribution is either a smooth function or a square wave function. To overcome the ill-conditioned problem that is often experienced in the deconvolution procedure, the regularization method and the TV-Tikhonov algorithm are applied. The noise influences from measured data points on the deconvolution procedure are discussed quantitatively.
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Jiangyong Wang,Physics department,Shantou University,China; wangjy@stu.edu.cn
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Primary author
Mr
Songyou Lian
(Shantou University)
Co-authors
Prof.
Jiangyong Wang
(Shantou University)
Dr
Xin Liang Yan
(Shantou university, China)
Mr
Yishan Han
(Shantou University)