SAIP2015

Structural and optical properties of TiN coatings produced by reactive magnetron sputtering at different substrate temperatures

30 Jun 2015, 16:10

1h 50m

Board: A.166

Poster Presentation Track A - Division for Physics of Condensed Matter and Materials Poster1

Speaker

Mr Charles Thulani Thethwayo (University of Zululand)

Level for award<br>&nbsp;(Hons, MSc, <br> &nbsp; PhD, N/A)?

MSc

Please indicate whether<br>this abstract may be<br>published online<br>(Yes / No)

yes

Apply to be<br> considered for a student <br> &nbsp; award (Yes / No)?

yes

Main supervisor (name and email)<br>and his / her institution

Prof OM Ndwandwe, ndwandweo@unizulu.ac.za

Would you like to <br> submit a short paper <br> for the Conference <br> Proceedings (Yes / No)?

yes

Abstract content <br> &nbsp; (Max 300 words)<br><a href="http://events.saip.org.za/getFile.py/access?resId=0&materialId=0&confId=34" target="_blank">Formatting &<br>Special chars</a>

This paper reports the effect of substrate temperature on the structural and optical properties of titanium nitrate (TiN) coatings. TiN coatings were deposited on silicon (100) wafer and glass slide substrates using direct current magnetron sputtering system at substrate temperatures varied from room temperature (RT), 150, 250, and 350 &#176C. The optical properties, structural, chemical composition and thickness of the film were investigated using photoluminescence (PL), UV-Vis spectroscope, X-rays diffraction (XRD), energy dispersive X-rays spectroscope (EDS) and Rutherford backscattering (RBS). The RBS results show that the thickness of the film decreases with the increase in substrate temperature. PL and UV-Vis show that TiN coatings have a good light absorption at sample prepared at lower substrate temperatures. The crystallinity of TiN coatings increases with the increase on the substrate temperature.