Recent Advances in MEMS Deformable Mirror Technology
Presented by Mr. paul BIERDEN on 4 Sep 2013 from 10:10 to 10:30
Session: Session V: AO Techniques
Track: Oral Presentation
With the continual expansion in the use of adaptive optics in the fields of biological imaging, ophthalmic instrumentation and laser communication, the demands on the wavefront corrector has also continued to grow. This paper will describe the design, manufacture, and testing results of the latest generation of optical quality micromachined deformable mirrors (DMs) that have been manufactured to meet these needs. We will also discuss the latest in the area of packaging and high voltage drive electronics to make the MEMS DMs more easily integrated into advanced research operations. Finally, new test procedures and modeling of these devices for open loop operation will be presented.