4-8 July 2016
Kramer Law building
Africa/Johannesburg timezone
<a href="http://events.saip.org.za/internalPage.py?pageId=10&confId=86">The Proceedings of SAIP2016</a> published on 24 December 2017

Structural and electrical properties of ruthenium thin films on 6H-SiC annealed in the air

6 Jul 2016, 16:10
1h 50m
Kramer Law building

Kramer Law building

UCT Middle Campus Cape Town
Board: F.013
Poster Presentation Track F - Applied Physics Poster Session (2)

Speaker

Dr Kinnock Vundawaka Munthali (University of Pretoria and University of Namibia)

Abstract content <br> &nbsp; (Max 300 words)<br><a href="http://events.saip.org.za/getFile.py/access?resId=0&materialId=0&confId=34" target="_blank">Formatting &<br>Special chars</a>

Ruthenium (Ru) Schottky contacts and thin films on n-type 6H-SiC were fabricated and characterised by physical and electrical methods. The characterisation was done after annealing the samples in air at various temperatures. Rutherford backscattering spectroscopy (RBS) analysis of the thin films indicated the oxidation of Ru, after annealing at a temperature of 400 oC , and interdiffusion of Ru and Si at the Ru-6H-SiC interface at 500 C. XRD analysis of the thin films indicated the formation of RuO2 and RuSi in Ru-6H-SiC after annealing at a temperature of 600 C. The formation of the oxide was also corroborated by Raman spectroscopy.The ideality factor of the Schottky barrier diodes (SBD) was seen to generally decrease with annealing temperature. The series resistance increaseed astronomically after annealing at 700 C which was an indication that the SBD had broken down. The failure mechanism of the SBD is attributed to deep inter-diffusions of Ru and Si at the Ru-6H-SiC interface as evidenced from the RBS of the thin films.

Please indicate whether<br>this abstract may be<br>published online<br>(Yes / No)

Yes

Would you like to <br> submit a short paper <br> for the Conference <br> Proceedings (Yes / No)?

No

Level for award<br>&nbsp;(Hons, MSc, <br> &nbsp; PhD, N/A)?

N/A

Main supervisor (name and email)<br>and his / her institution

Prof Chris Theron, chris.theron@up.ac.za

Apply to be<br> considered for a student <br> &nbsp; award (Yes / No)?

No

Primary author

Dr Kinnock Vundawaka Munthali (University of Pretoria and University of Namibia)

Co-authors

Prof. Chris Theron (University of Pretoria) Prof. Danie Auret (University of Pretoria)

Presentation Materials

There are no materials yet.